Mō ngā optoelectronics e hangai ana ki te silicon, ngā photodetectors silicon
Nga kairapu whakaahuate huri i ngā tohu mārama hei tohu hiko, ā, i te mea kei te piki haere tonu ngā tere whakawhiti raraunga, kua noho ko ngā taputapu whakaahua tere-teitei kua whakauruhia ki ngā tūāpapa optoelectronics e hangai ana ki te silicon hei mea nui ki ngā pokapū raraunga me ngā whatunga whakawhitiwhiti kōrero o te whakatupuranga e whai ake nei. Ka whakaratohia e tēnei tuhinga he tirohanga whānui mō ngā taputapu whakaahua tere-teitei matatau, me te aro nui ki te germanium e hangai ana ki te silicon (Ge, Si rānei photodetector).ngā taputapu whakaahua siliconmō te hangarau optoelectronics whakauru.
He rauemi ātaahua te Germanium mō te kimi mārama tata-whero i runga i ngā tūāpapa silicon nā te mea he hototahi ki ngā tukanga CMOS, ā, he tino kaha te mimiti i ngā roangaru whakawhitiwhiti kōrero. Ko te hanganga whakaahua Ge/Si tino noa ko te pine diode, kei reira te germanium ā-roto e piri ana i waenganui i ngā rohe momo-P me te momo-N.
Hanganga taputapu E whakaatu ana te Pikitia 1 i tētahi pine poutū noa Ge orPūoko whakaahua Sihanganga:
Ko ngā āhuatanga matua ko: te paparanga mimiti germanium i whakatōkia ki runga i te papa silicon; Whakamahia hei kohi i ngā hononga p me te n o ngā kaikawe utu; te hononga arataki ngaru mō te mimiti mārama pai.
Te tipu epitaxial: He uaua te whakatipu germanium kounga teitei ki runga i te silicon nā te 4.2% te kore ōrite o te whatunga i waenga i ngā rauemi e rua. E whakamahia ana he tukanga tipu e rua ngā taahiraa: te tipu o te paparanga ārai pāmahana iti (300-400°C) me te whakatakotoranga o te germanium i te pāmahana teitei (neke atu i te 600°C). Ka āwhina tēnei tikanga ki te whakahaere i ngā nekehanga miro i puta mai i ngā kore ōrite o te whatunga. Ko te whakamahana i muri i te tipu i te 800-900°C ka whakaiti ake i te kiato nekehanga miro ki te 10^7 cm^-2. Ngā āhuatanga mahi: Ka taea e te taputapu whakaahua PIN Ge/Si tino matatau te whakatutuki i: te urupare, > 0.8A /W i te 1550 nm; Te whānui o te hononga, >60 GHz; Te au pōuri, <1 μA i te -1 V te pānga.
Te whakaurunga ki ngā tūāpapa optoelectronics e hangai ana ki te silicon
Te whakaurunga ongā pūoko whakaahua tere-teiteiMā ngā tūāpapa hikohiko optoelectronics e hangai ana ki te silicon ka taea ai ngā whakawhiti whatu matatau me ngā hononga. Ko ngā tikanga whakauru matua e rua koia ēnei: Whakaurunga pito-mua (FEOL), ko te wāhi e hangaia ai te photodetector me te transistor i te wā kotahi i runga i te papa silicon e taea ai te tukatuka pāmahana teitei, engari e kapi ana i te wāhi maramara. Whakaurunga pito-muri (BEOL). Ka hangaia ngā photodetector ki runga i te konganuku hei karo i te pokanoa ki te CMOS, engari ka whakawhāitihia ki ngā pāmahana tukatuka iti iho.
Pikitia 2: Te urupare me te whānui o te whānuitanga o te taputapu whakaahua Ge/Si tere-teitei
Taupānga pokapū raraunga
He wāhanga matua ngā taputapu kite whakaahua tere-teitei i roto i te whakatupuranga hou o te hononga pokapū raraunga. Ko ngā tono matua ko: ngā whakawhiti whatu: 100G, 400G me ngā tere teitei ake, mā te whakamahi i te whakarerekētanga PAM-4; Apūoko whakaahua whānui-rahi(>50 GHz) e hiahiatia ana.
Ara iahiko whakauru hiko-whakakotahi e hangai ana ki te silicon: te whakaurunga kotahi o te pūoko me te modulator me ētahi atu wāhanga; He mīhini whatu kiato, mahi teitei.
Te hoahoanga tohatoha: te hononga whatu i waenga i te rorohiko tohatoha, te rokiroki, me te rokiroki; Te akiaki i te hiahia mō ngā taputapu whakaahua whai hua-pūngao, whānui-rahi.
Te tirohanga ā-mua
Ka whakaatuhia e te heke mai o ngā taputapu whakaahua tere-teitei optoelectronic whakauru ngā au e whai ake nei:
Ngā tere raraunga teitei ake: Te akiaki i te whanaketanga o ngā transceivers 800G me te 1.6T; E hiahiatia ana ngā photodetectors me ngā whānui whānui neke atu i te 100 GHz.
Whakaurunga whakapai ake: Whakaurunga maramara kotahi o te rauemi III-V me te silicon; Hangarau whakauru 3D matatau.
Ngā rauemi hou: Te tūhura i ngā rauemi rua-ahu (pērā i te graphene) mō te kimi māramatanga tino tere; He koranu Rōpū IV hou mō te kapi roa o te roanga ngaru.
Ngā tono hou: Ko te LiDAR me ētahi atu tono pūoko kei te akiaki i te whanaketanga o te APD; Ko ngā tono photon ngaruiti e hiahia ana ki ngā pūoko whakaahua raina teitei.
Ko ngā taputapu whakaahua tere-rahi, inā koa ko ngā taputapu whakaahua Ge, Si rānei, kua noho hei kaupapa matua mō ngā optoelectronics e hangai ana ki te silicon me ngā whakawhitiwhitinga whatu o te whakatupuranga e whai ake nei. He mea nui ngā whanaketanga tonu o ngā rauemi, te hoahoa taputapu, me ngā hangarau whakauru hei whakatutuki i ngā hiahia whānui e tipu haere ana o ngā pokapū raraunga me ngā whatunga whakawhitiwhiti kōrero a meake nei. I te whanaketanga tonu o te mara, ka taea e tātou te tumanako ka kite i ngā taputapu whakaahua me te whānui teitei ake, te haruru iti iho, me te whakauru pai ki ngā ara iahiko hiko me te photonic.
Wā tuku: Hanuere-20-2025