Ngā whakaahua hikongā wāhanga kore mahi
He maha ngā wāhanga matua o te hangarau whakaahua-ā-ringa. Ko tētahi o ēnei he hononga whatu-whakaputa-mata, e whakaaturia ana i te Pikitia 1A. Kei roto he whatu kaha i roto i te arataki-ngaru e tata ana ki te roangaru o te ngaru mārama i roto i te arataki-ngaru. Mā tēnei ka taea te tuku, te whiwhi rānei i te mārama i runga i te mata, he mea tino pai mō ngā ine taumata-wafer me/ranei te hononga ki te muka. He āhua motuhake ngā hononga whatu ki te hangarau whakaahua-ā-ringa nā te mea me nui te rerekētanga taupū poutū. Hei tauira, ki te ngana koe ki te hanga i tētahi hononga whatu i roto i tētahi arataki-ngaru InP tikanga, ka turuturu tika te mārama ki roto i te papa, kaua e tukuna poutū nā te mea he iti ake te taupū whakaata toharite o te arataki-ngaru i te papa. Kia mahi ai i roto i te InP, me keri te rauemi i raro i te whatu hei whakairi, e whakaaturia ana i te Pikitia 1B.
Pikitia 1: ngā hononga kupenga kotahi-ahu e whakaputa ana i te mata i roto i te silicon (A) me te InP (B). I roto i te (A), ko te hina me te kikorangi mārama e tohu ana i te silicon me te silica. I roto i te (B), ko te whero me te karaka e tohu ana i te InGaAsP me te InP. Ko ngā Pikitia (C) me te (D) he whakaahua karu hiko matawai (SEM) o tētahi hononga kupenga cantilever InP e iri ana.
Ko tētahi atu wāhanga matua ko te kaitahuri rahi-ira (SSC) i waenganui i tearataki ngaru whatume te muka, e huri ana i te aratau o te 0.5 × 1 μm2 i roto i te arataki ngaru silicon ki te aratau o te 10 × 10 μm2 i roto i te muka. Ko te huarahi noa ko te whakamahi i tētahi hanganga e kiia nei ko te inverse taper, e āta whakawhāiti haere ana te arataki ngaru ki tētahi pito iti, ka hua ake he whānui nui o tewhatupapaki aratau. Ka taea te hopu i tēnei aratau mā te arataki ngaru karāhe iri, e whakaaturia ana i te Pikitia 2. Mā te SSC pēnei, ka taea te whakatutuki i te ngaronga hononga iti iho i te 1.5dB.
Pikitia 2: Te kaitahuri rahi tauira mō ngā arataki ngaru waea silicon. Ka hangaia e te rauemi silicon he hanganga kōniko whakamuri i roto i te arataki ngaru karāhe iri. Kua whakairohia te papa silicon i raro i te arataki ngaru karāhe iri.
Ko te wāhanga matua o te mahi kore mahi ko te wehewehe hihi pōrari. Kei te Pikitia 3 ētahi tauira o ngā wehewehe pōrari. Ko te tuatahi he ine whakawhiti Mach-Zender (MZI), he rerekē te birefringence o ia ringa. Ko te tuarua he hononga ahunga māmā. He tino teitei te āhua birefringence o te arataki ngaru waea silicon noa, nō reira ka taea te hono katoa i te mārama pōrari aukume whakawhiti (TM), ko te mārama pōrari hiko whakawhiti (TE) ka taea te wetewete tata. Ko te tuatoru he hononga kutikuti, kei reira te muka e whakanohoia ana ki te koki kia honoa ai te mārama pōrari TE ki tetahi taha, ā, ka honoa te mārama pōrari TM ki tetahi taha. Ko te tuawhā he hononga kutikuti rua-ahu. Ko ngā momo muka e poutū ana ngā mara hiko ki te ahunga o te horapa arataki ngaru ka honoa ki te arataki ngaru e rite ana. Ka taea te whakatītaha i te muka ka honoa ki ngā arataki ngaru e rua, ki te poutū rānei ki te mata ka honoa ki ngā arataki ngaru e whā. Ko tētahi atu painga o ngā hononga kupenga rua-ahu ko tā rātou mahi hei hurihanga pōraritanga, ko te tikanga he rite tonu te pōraritanga o te mārama katoa i runga i te maramara, engari e rua ngā pōraritanga orthogonal e whakamahia ana i roto i te muka.
Pikitia 3: Ngā wehewehenga porowhita maha.
Te wā tuku: Hurae-16-2024