Hanganga oPūoko whakaahua InGaAs
Mai i te tekau tau atu i 1980, kua rangahauhia e ngā kairangahau i te kāinga me tāwāhi te hanganga o ngā pūoko whakaahua InGaAs, e toru ngā momo matua. Ko te pūoko whakaahua InGaAs whakarewa-Haumaru-whakahaere (MSM-PD), te pūoko whakaahua InGaAs PIN (PIN-PD), me te pūoko whakaahua InGaAs Avalanche (APD-PD). He rerekētanga nui kei roto i te tukanga hanga me te utu o ngā pūoko whakaahua InGaAs me ngā hanganga rerekē, ā, he rerekētanga nui anō hoki kei roto i te mahi a te taputapu.
Ko te InGaAs whakarewa-haurua-whakarewapūoko whakaahua, e whakaaturia ana i te Pikitia (a), he hanganga motuhake e hangai ana ki te hononga Schottky. I te tau 1992, i whakamahia e Shi me ētahi atu te hangarau epitaxy wāhanga kohu whakarewa-organic pēhanga iti (LP-MOVPE) hei whakatipu i ngā paparanga epitaxy, ā, i whakaritea he taputapu whakaahua InGaAs MSM, he nui te urupare o te 0.42 A/W i te roanga ngaru o te 1.3 μm me te iahiko pouri i raro iho i te 5.6 pA/ μm² i te 1.5 V. I te tau 1996, i whakamahia e zhang me ētahi atu te epitaxy hihi ngota hau (GSMBE) hei whakatipu i te paparanga epitaxy InAlAs-InGaAs-InP. I whakaatuhia e te paparanga InAlAs ngā āhuatanga ātete teitei, ā, i arotauhia ngā āhuatanga tipu mā te ine i te diffraction hihi-X, kia noho te kore ōrite o te whatunga i waenga i ngā paparanga InGaAs me InAlAs i roto i te awhe o te 1×10⁻³. Ko te hua o tēnei, he pai ake te mahi a te taputapu me te ia pōuri i raro i te 0.75 pA/μm² i te 10 V, me te urupare tere ki te 16 ps i te 5 V. I te nuinga o te wā, he māmā noa te whakauru i te taputapu whakaahua hanganga MSM, e whakaatu ana i te ia pōuri iti (raupapa pA), engari ka whakaitihia e te hiko whakarewa te horahanga mimiti mārama whai hua o te taputapu, nō reira he iti ake te urupare i ētahi atu hanganga.
Ka whakauruhia e te pūoko whakaahua PIN InGaAs he paparanga ā-roto i waenganui i te paparanga whakapā momo-P me te paparanga whakapā momo-N, e whakaaturia ana i te Pikitia (b), e whakanui ana i te whānui o te rohe whakahekenga, ā, ka nui ake ngā takirua irahiko-pōhatu e tukuna ana, ka hangaia he iahiko whakaahua nui ake, nō reira he pai rawa te mahi kawe irahiko. I te tau 2007, i whakamahia e A.Poloczek me ētahi atu te MBE ki te whakatipu i tētahi paparanga ārai pāmahana-iti hei whakapai ake i te taratara o te mata me te wikitoria i te kore ōrite o te whatunga i waenga i te Si me te InP. I whakamahia te MOCVD ki te whakauru i te hanganga PIN InGaAs ki runga i te papa InP, ā, ko te urupare o te taputapu he tata ki te 0.57A /W. I te tau 2011, i whakamahia e te Tari Rangahau o te Ope Taua (ALR) ngā pūoko whakaahua PIN ki te ako i tētahi pūoko whakaahua liDAR mō te whakatere, te karo i ngā arai/tukinga, me te kimi/tāutu i ngā ūnga tawhiti-poto mō ngā waka whenua iti kore tangata, i whakauruhia ki tētahi maramara whakakaha ngaruiti utu iti i whakapai ake i te ōwehenga tohu-ki-haruru o te pūoko whakaahua PIN InGaAs. I runga i tēnei kaupapa, i te tau 2012, i whakamahia e ALR tēnei taputapu whakaahua liDAR mō ngā karetao, me te whānuitanga kite neke atu i te 50 m me te taumira o te 256 × 128.
Ngā InGaApūoko whakaahua horongahe momo taputapu whakaahua me te whakanui, ko tōna hanganga e whakaaturia ana i te Pikitia (c). Ka whiwhi te takirua irahiko-pōha i te kaha e tika ana i raro i te mahi a te mara hiko i roto i te rohe takirua, kia tukinga ai ki te ngota, kia puta ai he takirua irahiko-pōha hou, kia puta ai he pānga horonga, ā, kia whakareatia ai ngā kaikawe kore-taurite i roto i te rauemi. I te tau 2013, i whakamahia e George M te MBE ki te whakatipu i ngā koranu InGaAs me InAlAs kua ōrite ki runga i te papa InP, mā te whakamahi i ngā huringa i roto i te hanganga koranu, te matotoru o te paparanga epitaxial, me te tāpiri ki te kaha kaikawe kua whakarerekētia hei whakanui ake i te ionization electroshock me te whakaiti i te ionization poka. I te whakanui tohu putanga ōrite, ka whakaatu te APD i te haruru iti me te ia pōuri iti. I te tau 2016, i hangaia e Sun Jianfeng me ētahi atu he huinga o te tūāpapa whakamātautau whakaahua hohe laser 1570 nm i runga i te taputapu whakaahua horonga InGaAs. Ko te ara iahiko o roto oPūoko whakaahua APDka whiwhi i ngā whakaataoro, ā, ka whakaputa tika i ngā tohu matihiko, ka hanga kiato te taputapu katoa. Kei te whakaatuhia ngā hua whakamātautau i te PIK. (d) me te (e). Ko te Pikitia (d) he whakaahua ā-tinana o te ūnga whakaahua, ā, ko te Pikitia (e) he whakaahua tawhiti-toru-ahu. Ka kitea mārama ko te horahanga matapihi o te rohe c he tawhiti hohonu me te rohe A me te b. Ka kitea e te tūāpapa he whānui pāoro iti iho i te 10 ns, he kaha pāoro kotahi (1 ~ 3) mJ ka taea te whakarite, he koki mara arotahi whiwhi o te 2°, he auau tāruarua o te 1 kHz, he ōwehenga mahi pūoko tata ki te 60%. Nā te pikinga o te iahiko whakaahua ā-roto o te APD, te urupare tere, te rahi kiato, te roa me te utu iti, ka taea e ngā pūoko whakaahua APD te tere teitei ake i ngā pūoko whakaahua PIN, nō reira ko te liDAR matua o nāianei ko ngā pūoko whakaahua avalanche te nuinga.
I te nuinga o te wā, me te tere o te whanaketanga o te hangarau whakarite InGaAs i te kāinga me tāwāhi, ka taea e tātou te whakamahi pūkenga i te MBE, MOCVD, LPE me ētahi atu hangarau hei whakarite i te paparanga epitaxial InGaAs kounga teitei i runga i te papa InP. He iti te au pōuri o ngā taputapu whakaahua InGaAs me te urupare teitei, ko te au pōuri iti rawa kei raro iho i te 0.75 pA/μm², ko te urupare mōrahi kei te 0.57 A/W, ā, he tere te urupare whakawhiti (raupapa ps). Ko te whanaketanga ā muri ake nei o ngā taputapu whakaahua InGaAs ka arotahi ki ēnei āhuatanga e rua: (1) Ka whakatipu tikahia te paparanga epitaxial InGaAs ki runga i te papa Si. I tēnei wā, ko te nuinga o ngā taputapu hiko iti i te mākete he mea hanga ki te Si, ā, ko te whanaketanga whakauru i muri mai o te InGaAs me te Si te ia whānui. He mea nui te whakaoti rapanga pēnei i te kore taurite o te whatunga me te rerekētanga o te tauwehenga whānui wera mō te ako i te InGaAs/Si; (2) Kua pakari te hangarau roangaru 1550 nm, ā, ko te roangaru roangaru (2.0 ~ 2.5) μm te huarahi rangahau ā muri ake nei. I te pikinga ake o ngā wāhanga In, ka nui ake te hē o te whatunga i waenga i te papa InP me te paparanga epitaxial InGaAs, nō reira me arotau ngā tawhā tukanga o te pūrere, me whakaiti i ngā hapa whatunga, me te whakaiti i te au pōuri o te pūrere.
Wā tuku: Mei-06-2024