Pūnaha rauemi ara iahiko whakauru photonic (PIC)
Ko te hangarau whakaahua-a-kirimona he kaupapa e whakamahi ana i ngā hanganga papatahi i runga i ngā rauemi hiko-a-kirimona hei arahi i te mārama kia tutuki ai ngā momo mahi. Ka arotahi mātou ki te whakamahinga o ngā hangarau whakaahua-a-kirimona hei hanga i ngā tuku me ngā kaiwhiwhi mō ngā whakawhitiwhitinga muka whatu. I te pikinga ake o te hiahia ki te tāpiri atu i te tuku i runga i tētahi whānuitanga kua whakaritea, i tētahi tapuwae kua whakaritea, me tētahi utu kua whakaritea, ka pai ake te āhua o te hangarau whakaahua-a-kirimona. Mō te wāhanga whatu,hangarau whakauru photonicme whakamahi, ā, ko te nuinga o ngā kaiwhakawhitiwhiti mārama o ēnei rā ka hangaia mā te whakamahi i ngā whakarerekētanga LiNbO3/papatahi marama-ngaru (PLC) motuhake me ngā kaiwhiwhi InP/PLC.
Pikitia 1: E whakaatu ana i ngā pūnaha rauemi ara iahiko whakauru photonic (PIC) e whakamahia whānuitia ana.
E whakaatu ana te Pikitia 1 i ngā pūnaha rauemi PIC rongonui. Mai i te maui ki te matau ko te PIC silica e hangai ana ki te silicon (e mōhiotia ana ko te PLC), te PIC ārai e hangai ana ki te silicon (silicon photonics), te lithium niobate (LiNbO3), me te PIC rōpū III-V, pērā i te InP me te GaAs. E arotahi ana tēnei pepa ki te photonics e hangai ana ki te silicon. I roto ingā hangarau whakaahua silicon, ko te tohu mārama e haere ana i roto i te silicon, he āputa roopu ā-korekore o te 1.12 ngaohiko irahiko (me te roanga ngaru o te 1.1 maikorona). Ka whakatipuhia te silicon hei tioata parakore i roto i ngā oumu, kātahi ka tapahia hei wafer, he 300 mm te whānui i ēnei rā. Ka whakahāngaihia te mata o te wafer hei hanga i tētahi paparanga silicon. Ka pupuhihia tētahi o ngā wafer ki ngā ngota hauwai ki tētahi hohonutanga. Kātahi ka honoa ngā wafer e rua ki roto i te korehau, ā, ka piri ō rātou paparanga waikura tetahi ki tetahi. Ka pakaru te huihuinga i te rārangi whakaurunga katote hauwai. Kātahi ka whakakanapahia te paparanga silicon i te kapiti, ā, ka waiho he paparanga angiangi o te tioata Si ki runga i te wafer "kakau" silicon kāore i pakaru ki runga i te paparanga silicon. Ka hangaia ngā arataki ngaru mai i tēnei paparanga tioata angiangi. Ahakoa ka taea e ēnei wafer ārai-silicon (SOI) te whakamahi i ngā arataki ngaru silicon photonics iti-ngaronga, he nui ake te whakamahinga i roto i ngā ara iahiko CMOS iti-mana nā te iti o te ia turuturu e whakaratohia ana e rātou.
He maha ngā momo arataki whatu e ahu mai ana i te silicon, e whakaaturia ana i te Pikitia 2. Kei roto i ēnei ko ngā arataki silica kua tāpirihia ki te germanium iti rawa ki ngā arataki Silicon Wire nano. Mā te whakaranu i te germanium, ka taea te hanganga kaitirotiro whakaahuame te mimiti hikongā kaiwhakarerekē, ā, tera pea ko ngā whakakaha whatu. Mā te tāpiri i te silicon, hepūwhakarerekētanga whatuka taea te hanga. Ko ngā mea o raro mai i te maui ki te matau ko: te arataki ngaru waea silicon, te arataki ngaru silicon nitride, te arataki ngaru silicon oxynitride, te arataki ngaru hiwi silicon matotoru, te arataki ngaru silicon nitride angiangi me te arataki ngaru silicon kua tāpirihia. Kei runga, mai i te maui ki te matau, ko ngā kaiwhakatikatika whakaheke, ngā kaiwhakaahua germanium, me te germanium.ngā whakakaha whatu.
Pikitia 2: Te wāhanga whakawhiti o tētahi raupapa arataki ngaru whatu e hangai ana ki te silicon, e whakaatu ana i ngā ngaronga horapa noa me ngā taupū whakaata.
Te wā tuku: Hurae-15-2024