He aha tātou me whakamahi ai i a Ge heipūoko whakaahua
1, Te tūnga taketake: He aha te take e tika ai te whakamahi i a Ge hei taputapu whakaahua
I roto i ngā hononga whatu silicon, ko te photodetector ngā "kaiwhakamāori" e huri ana i ngā tohu whatu ki ngā tohu hiko. Heoi, ko te āputa roopu o te silicon he 1.12 eV, ā, he tata mārama ki ngā roopu whakawhitiwhiti 1310/1550 nm, nō reira ko te germanium (Ge) anake ka taea te whakauru.
He 0.8 eV te āputa whakawhiti tika o Ge, e kapi ana i te aputa whakawhitiwhiti O/C, engari he 4.2% te kore ōrite o te whatunga ki te silicon. Ko te kiato nekehanga mō te tipu tika he teitei ki te 4 × 10⁸cm⁻², ā, kāore e taea te whakamahi i te iahiko pōuri; I taua wā anō, he āputa whakawhiti kore tika a Ge, ā, ko tōna tauwehenga mimiti he iti iho i te InGaAs, he ngoikore tūturu tēnei.
2, Te putanga matua: ka pakaru te whakaurunga o te arataki ngaru i te aukati mahi
He "whanuitanga urupare" te "roa mimiti=ara kohikohinga kawe" o ngā taputapu whakaahua taunga poutū tuku iho, me te rohenga o runga ko te 7GHz anake;
I tēnei wā, e toru ngā momo taputapu matua e wehea ana:
Pine poutū: Ko te tukanga tino māmā, tino rongonui hoki i roto i te umanga, e tutuki ana i te 40Gb/s @ kore whakaaro, me te whānui o te whānui >60GHz;
MSM Metal Semiconductor Metal: Kāore e hiahiatia he tāpiritanga pāmahana-tiketike, ka taea te whakauru ki te pito o muri, he nui te iahiko pōuri, ā, he whānui o te whānui neke atu i te 40GHz;
Ngā momo kounga teitei:Ngā pūoko whakaahua ngaru haere(TWPD) me ngā pūoko whakaahua kawe kotahi raina (UTC) e whakamahia ana mō ngā hononga photon ngaruiti, hei whakataurite i te whānui o te whānui me te iahiko whakaahua kukū tiketike.
3, Ngā Rauemi me te Mahi Toi: Te Huri i ngā 'Hapa' hei Painga
Hei whakautu ki te kore e ōrite te whatunga me ngā ngoikoretanga o te mahi, kua whakawhanakehia e te umanga ngā otinga pakari:
Tikanga epitaxy e rua ngā taahiraa: tuatahi, ka whakatupuhia he paparanga ārai pāmahana-iti o te 30-50nm, kātahi ka whakanuia te pāmahana kia eke ki te matotoru e hiahiatia ana, ka whakaitihia te kiato nekehanga ki ~10 ⁷ cm ⁻ ²;
Te hangarau totoro: Mā te rerekētanga o ngā tauwehenga whānui wera i waenga i te Ge me te Si ka puta he totoro kume biaxial 0.2% i roto i te kiriata Ge, ka hua ake he whakahekenga āputa roopu tika mai i te 0.8 eV ki te 0.77 eV me te toronga taha mimiti mai i te 1.55 μm ki te 1.61 μm, e kapi ana i te roopu C+L katoa, ā, tae noa ki te tauwehenga mimiti i roto i te roopu L ka taea te ōrite ki te InGaAs;
Whakaurunga CMOS: Kei te wāhanga tūhura tonu. Me tu atu te whakauru pito mua (FEOL) i ngā pāmahana teitei ake i te 750 ℃, ko te whakauru pito muri (BEOL) he pai ki te pāmahana engari kāore he papa tioata, ā, kāore anō kia hangaia he otinga pakari kotahi. I tēnei wā, ko te tikanga o te umanga he huarahi whakauru o te "90% maramara-kotahi + o wahorēseri"."
Wā tuku: Pipiri-23-2026




